Abstract

We employ ab initio calculations to investigate energetics of point defects in metastable rocksalt cubic Ta-N and Mo-N. Our results reveal a strong tendency to off-stoichiometry, i.e. defected structures are surprisingly predicted to be more stable than perfect ones with metal-to-nitrogen stoichiometry. Despite the similarity of Ta-N and Mo-N systems in exhibiting this unusual behaviour, we also point out their crucial differences. While Ta-N significantly favours metal vacancies, Mo-N exhibits similar energies of formation regardless of the vacancy type (VMo, VN) as long as their concentration is below . The overall lowest energies of formation were obtained for and , which are hence predicted to be the most stable compositions. To account for various experimental conditions during synthesis, we further evaluated the phase stability as a function of chemical potential of individual species. The proposed phase diagrams reveal four stable compositions, , , and , in the case of Mo-N and nine stable compositions in the case of Ta-N indicating the important role of metal under-stoichiometry, since and significantly dominate the diagram. This is particularly important for understanding and designing experiments using non-equilibrium deposition techniques. Finally, we discuss the role of defect ordering and estimate a cubic lattice parameter as a function of defect contents and put them in the context of existing literature theoretical and experimental data.

Highlights

  • Point defects are unavoidably present on materials

  • The results demonstrate a strong tendency for off-stoichiometry in both systems which is in excellent agreement with previous studies on TaN, and experimental observations reporting c-MoN and c-TaN with 1:1 metal-to-nitrogen stoichiometry as metastable structures

  • Our calculations indicate that phase stability can be largely affected by the vacancies formation

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Summary

Introduction

Point defects are unavoidably present on materials. At finite temperatures, their concentration is given by thermodynamical equilibrium. The unique combination of physical and chemical characteristics stemming from the wide range of MoN stoichiometries, as investigated recently by Yu et al [7], makes this material very promising for various applications [8], especially as a wear protective coating and diffusion barrier for Al metallizations in ultra large-scale integrated circuits (ULSI) [9]. Previous theoretical and experimental studies concluded that the NaCl-type MoN and TaN were metastable structures [6, 11, 12, 9, 8, 13, 14], with a wide range of compositions around the 1:1 metal-to-nitrogen stoichiometry. The aim of present study is to carefully consider a wide spectrum of defected structures, involving various point defect configurations, obtain the energetics with respect to the occupancy of the metal and N sublattice, and estimated the ranges of stability for various metastable cubic phases which are of relevance for experiment

Calculation details
Stability of cubic Mo-N and Ta-N systems
Impact of deposition conditions
Vacancy formation energies
Structural parameters
Ordering of vacancies
Conclusions
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