Abstract
A new seven-channel transmission grating with plus-shaped array under normal incidence is proposed and discussed in this paper. Through the simulated annealing (SA) algorithm and rigorous coupled-wave analysis (RCWA), the novel microstructure can split the incident energy into 0-th/±1-st/±2-nd/±3-rd orders evenly. The influence of incident angle, period, incident wavelength, and other parameters on the diffraction efficiency are also analyzed in this paper. For transverse magnetic (TM) polarization, the range of period is 3062–3246 nm and the bandwidth of incident angle and wavelength is 1.96° and 32.3 nm, respectively. It can be concluded that the TM-polarized light of the designed grating has a good performance in incident bandwidth and fabrication tolerance. In addition, the efficiency of transverse electric (TE) polarization has the satisfactory uniformity of 2.40%. Therefore, the proposed grating has a certain significance for the research of multi-port beam splitter, especially for the seven-channel polarization-independent beam splitter.
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