Abstract
In this paper, we present the state-of-the-art of deep lithography with protons (DLP), a technology that we have adopted and optimized to rapidly prototype three-dimensional micro optical components and high-aspect-ratio micro mechanical structures in poly(methyl methacrylate). In particular, we focus on the fabrication of individual plastic refractive microlenses featuring a wide range of numerical apertures, diameters and pitches and on their 2-dimensional arrays. We provide a detailed description of the microlens fabrication technique and its calibration procedure. We highlight the quantitative geometrical and optical characteristics of these DLP microlenses and we demonstrate the reproducibility of their fabrication process. We also illustrate the prototyping flexibility of DLP by fabricating arrays featuring microlenses with different sags, pitches and diameters. As a conclusion, we analyze and discuss the strengths and weaknesses of this technology.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
