Plasmonic Metasurface Integrated Black Phosphorus‐Based Mid‐Infrared Photodetector with High Responsivity and Speed

Abstract

AbstractBlack Phosphorus (BP), a van der Waals (vdW) semiconducting material, is studied intensively due to its unique structural and anisotropic optical properties. BP exhibits optical anisotropy with thickness tunable direct bandgap from 0.3–2.0 eV. Many BP‐based photodetectors operating in the mid‐infrared (MIR) band are proposed, but their performance is still limited due to the small optical absorption cross section at room temperature. In this work, a plasmonic metasurface that has localized surface plasmon resonance (LSPR) at 3.7 µm is designed, matching well with the band edge of a BP flake and field confinement around the edge of Au‐disk as confirmed by finite difference time domain simulation and Fourier‐transform infrared spectroscopy measurement results. In addition, a BP flake is integrated on the plasmonic metasurface and a significant quenching (twelve‐fold) is observed in the photoluminescence owing to the Förster resonance energy transfer effect induced by dipole–dipole coupling. Following that, a BP‐based MIR photodetector is fabricated on the plasmonic metasurface. Here, the demonstrated BP/plasmonic metasurface‐based photodetector achieves the peak responsivity of 495.85 mAW−1 and ultrahigh operation speed (>10 MHz) at the power of 8.55 µW under 3.7 µm incident wavelength. This demonstrated photodetector opens a new opportunity for optoelectronic applications in the MIR region.