Abstract
The lower hybrid wave, which is in the same frequency range as the helicon wave, is resonant at the lower hybrid frequency and does not penetrate into the higher density side of the plasma. This creates the localized ionization region at the outer plasma radii and leads to uniform plasma production. Typical plasma densities in the plasma source designed to take advantage of this characteristic of the lower hybrid wave are of the order of 1011cm-3 in the source region for 10 mTorr He and 1 kW radio frequency (rf) power. The radial density profile can be controlled by changing the location of the lower hybrid resonance by changing the magnetic field B0. We measured the radial dependence of rf electric and magnetic fields to determine if lower hybrid wave and helicon wave were present.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.