Abstract
AbstractPlasma polymerization of indium acetylacetonate (InAcAc) was investigated from the viewpoint of the material preparation for application to chemical sensor devices. The plasma polymerization of InAcAc resulted in the deposition of films, which were hydrocarbon‐like polymers with fine particles of indium oxides. The deposition rate and the chemical composition of the deposited films were strongly influenced by the system pressure in operating the plasma polymerization, as well as by the substrate temperature. The deposited films possessed n‐type semiconductive properties and responded to reducing gases, such as CO, H2, C3H8, and C2H5OH, with increasing the conductivity. The sensor device composed of the films deposited from InAcAc showed extremely high sensitivity to CO and higher gas selectivity than the sensor devices consisting of SnO2 and ZnO2.
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