Plasma Generation upon Gas Ionization by Electronic Sources in the Pressure Range of 1–100 Pa (Review)

Abstract

In this paper, we review recent advances in the generation and study of beam plasma produced upon gas ionization by a stationary low-energy electron beam in the forevacuum pressure range (1–100 Pa). The features of the interaction of a stationary electron beam with the produced plasma during its transportation in a large-volume vacuum chamber, as well as the results of a study of the parameters of the plasma generated by the injection of an electron beam into a vessel with dielectric walls, are presented. It is shown that depending on the parameters of the electron beam, as well as the pressure and type of a gas, it is possible to create conditions for collective interaction with the ignition of a beam-plasma discharge characterized by an increased concentration and temperature of plasma electrons.