Plasma Diagnostics in an Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell

Abstract

An Inductively Coupled Plasma - Gaseous Electronics Conference reference cell was studied by different diagnostics: laser induced fluorescence, Langmuir probe, optical emission spectroscopy (Ar line ratios) and coil electrical measurements. Two modes of operation (high and low density plasma) were analyzed. A hysteresis in the transition between modes is identified only when the applied power is considered. When the plasma power is considered (coil losses are subtracted), the plasma parameters showed a smooth behavior between the two modes. The comparison of the plasma parameters obtained by different diagnostics showed a good agreement, revealing differences in the electron energy distribution function and the usefulness of Ar line ratio method.