Abstract
A novel plasma diagnostic method using a quartz sensor (Q-sensor) was applied to the analysis of NH3 plasmas at various pressures of 19.6–131.0 Pa. The change in the gas composition of the NH3 plasmas was derived from the change in the Q-sensor output through pressure normalization because the pressure-normalized Q-sensor output depends on the molecular weight and viscosity of the measured gas. The change in the gas composition of the NH3 plasmas agrees with the results obtained from the gas analysis using a quadrupole mass spectrometer (QMS): the plasma gas composition includes high-density H2 and low-density N2. The dissociation ratio of NH3 was compared with measurements obtained using the Q-sensor and QMS, which indicates that Q-sensor measurement is useful as a method of plasma diagnostics for obtaining the gas composition of NH3 plasmas at 19.6–131.0 Pa.
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