Plasma Devices Based on the Plasma Lens—A Review of Results and Applications

Abstract

We review some novel developments of the electrostatic plasma lens and some new plasma devices based on the plasma-optical idea of magnetic insulation of electrons and equipotentialization along magnetic field lines. The plasma lens configuration of crossed electric and magnetic fields provides an attractive and simple method in establishing a stable plasma discharge at low pressure and has been used to develop some cost-effective low-maintenance plasma devices for ion cleaning, surface activation, and polishing of substrates prior to film deposition. Recent embodiments of these devices use permanent magnets and possess considerable flexibility with respect to spatial configuration.