Abstract
Carbon containing zirconia films are deposited from chemical vapor deposition (CVD) and from plasma enhanced chemical vapor deposition (PECVD), as being used as thermal barrier coatings for many applications. Their thermal conductivity has been measured for temperatures ranging from room temperature up to 450 K using the 3 ω method. It is shown that the samples exhibit a lattice and an electronic contribution to the thermal conductivity reaching values up to 13 W/m/K for samples from CVD and up to 5 W/m/K for the samples from PECVD at 450 K. At room temperature, the thermal conductivities for PECVD films are in the range of 1 W/m/K, whereas the CVD film shows values of 8 W/m/K. The large differences are explained by the microstructure of the films, showing smaller grain sizes with poor interfaces for the PECVD films compared to the denser CVD films. This shows that plasma deposited carbon containing zirconia films may serve as excellent thermal barriers.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
