Planarized tapered waveguides for THz quantum cascade laser frequency combs

Abstract

Terahertz (THz) quantum cascade lasers (QCLs) based on double metal waveguides are compact sources of broadband THz radiation, which can also operate as frequency combs. We present a planarized double metal waveguide THz QCL platform, where the active region is embedded in a low-loss BCB polymer and covered by an extended top metallization. The latter enables placing bonding wires on the sides above the BCB-covered area, hindering the formation of any defects on the active region and enables the fabrication of waveguides with narrow widths below the bonding wire size. This can then be employed as a fundamental mode selection mechanism for comb operation without any side absorbers, and also features improved heat dissipation properties in continuous wave operation. The extended top metallization also enhances the RF properties of the device, as it encompasses a metallic cavity with the global ground plane. Experimentally, we present results on two different device geometries. First is a simple ridge waveguide with a width of 40 μm, narrow enough to act as a mode selection filter. Free-running frequency comb states with bandwidths above 600 GHz and single beatnotes up to -60 dBm are measured. With a strong external RF signal, close to the natural repetition frequency, we can broaden the emission to over 1.4 THz. The second type of device is a tapered waveguide, where the narrow sections act as a transversal mode filter, while the wider ones have lower waveguide losses and provide more gain. Due to a field-enhancement effect in the narrow sections, there is a significant enhancement in the four wave mixing, a third order nonlinear process responsible for comb formation. Free-running devices produce beatnotes close to -30 dBm, three orders of magnitude higher than for ridge devices. Improved comb performance is maintained also for high operating temperatures. A comb bandwidth above 200 GHz and a single beatnote above -60 dBm are measured at 115 K, very close to the maximum lasing temperature of 118 K. Beyond the improved laser and comb performance, the planarized waveguide platform also enables a relatively straightforward co-integration of active and passive elements.