Planar waveguides in Yb3+-doped tellurite glasses fabricated by ion implantation of oxygen

Abstract

A planar waveguide is demonstrated in the Yb 3+-doped tellurite glass, using (5+6) MeV O 3+ ion implantation with doses of (4+8)×1014 ions/cm2. The implantation process of O 3+ ions into the Yb 3+-doped tellurite glass is simulated by the stopping and range of ions in matter (SRIM) 2010 code. The dark-mode spectra are measured by the prism-coupling system at λ = 632.8 nm. The reflectivity calculation method and the finite-difference beam propagation method are used to calculate the refractive index profile and the modal profile of transverse electric (TE) mode of the fabricated waveguide, respectively. The absorption spectra show that the transmission properties are not affected by the waveguide fabrication process.