Optical properties investigation on Er3+ ion-doped tellurite glass by hydrogen and oxygen ion implantation

Abstract

Optical properties of Er3+ ion-doped tellurite glass waveguides were investigated by hydrogen and oxygen ion implantation. The hydrogen ions or oxygen ions were implanted into the mechanically polished tellurite glass (60TeO2–30WO3–10La2O3–1Er2O3) samples respectively by 460 KeV and 3000 KeV with different fluences, which were also simulated using SRIM 2013 (stopping and range of ions in matter). At the near surface of ion-implanted sample, peak location of nuclear energy loss at 4.8 μm and 2.85 μm were achieved separately in two kinds of implanted conditions, and planar optical waveguides were formed in Er3+-doped tellurite glasses. Fluorescence properties were investigated by using a confocal microscope with a fiber-coupled system. This work has reference value in the field of integrated optics device based on Er3+-doped tellurite glass.