Abstract
A planar solenoidal inductor for the realization of a variable inductor with a wide tunable range and a high quality factor (Q-factor) is proposed in this work. Prototype inductors are designed and fabricated using a two-metal micro-electro-mechanical systems (MEMS) process to demonstrate the potential use of the tunability of the inductance and the Q-factor. Inductance tuning from 1 to 3.3 nH was achieved and the tunability obtained was as high as 230% at 2 GHz. A Q-factor of more than 20 was observed in the frequency range of 2.5 to 6 GHz.
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