Planar integration of optical multilayer and its application to the design of IR multispectral filter arrays

Abstract

Infrared focal plane arrays (IRFPA) for staring imaging applications are now in advanced research and development stages. They offer spatial resolution in the focal plane. If spectral resolution is also required as for spectroscopic or analytical applications, a wavelength selection device is needed. The planar integration of different infrared interferencial filters on a single substrate, eventually the focal plane of such systems, would permit the obtention of arrays with spectral resolution in the focal plane and no moving parts. In this work the different aspects arising in the integration process of different IR optical multilayers on a single silicon substrate are discussed. From the experimental results of the performed works the feasibility of the proposed multispectral arrays can be derived.