Planar Hall Effect Magnetic Sensors with Extended Field Range

Abstract

The magnetic field range in which a magnetic sensor operates is an important consideration for many applications. Elliptical planar Hall effect (EPHE) sensors exhibit outstanding equivalent magnetic noise (EMN) on the order of pT/Hz, which makes them promising for many applications. Unfortunately, the current field range in which EPHE sensors with pT/Hz EMN can operate is sub-mT, which limits their potential use. Here, we fabricate EPHE sensors with an increased field range and measure their EMN. The larger field range is obtained by increasing the uniaxial shape-induced anisotropy parallel to the long axis of the ellipse. We present measurements of EPHE sensors with magnetic anisotropy which ranges between 12 Oe and 120 Oe and show that their EMN at 10 Hz changes from 800 pT/Hz to 56 nT/Hz. Furthermore, we show that the EPHE sensors behave effectively as single magnetic domains with negligible hysteresis. We discuss the potential use of EPHE sensors with extended field range and compare them with sensors that are widely used in such applications.