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https://doi.org/10.11522/pscjspe.2020s.0_25
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Cite Publication Date: Sep 3, 2020 | |
 License type: free |
Affiliation: Nagaoka University
plAn actuation and measurement system of mechanical step displacements with pico-meter resolution using single phase-locked loop, heterodyne interferometry, and piezoelectric driving stage
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