Abstract
This paper reports the first high spatial resolution room-temperature semiconductor gamma detector arrays. Results of wafer-scale fabrication of 48 by 48 element CdZnTe (CZT) arrays with 125 μm element pitch are presented. Performance characteristics are presented, including pulse height spectra using charge-sensitive preamplifier readout from witness test pixels, which show excellent energy resolution. High bulk and surface resistivities have been verified for these arrays, thus good energy resolution with multiplexer readout is expected.
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