Pitch dependence of the tolerance of CMOS monolithic active pixel sensors to non-ionizing radiation

Abstract

CMOS monolithic active pixel sensors (MAPS) have demonstrated excellent performance as tracking detectors for charged particles. They provide an outstanding spatial resolution (a few μm), a detection efficiency of ≳99.9%, very low material budget (0.05%X0) and good radiation tolerance (≳1Mrad, ≳1013neq/cm2) (Deveaux et al. [1]). This makes them an interesting technology for various applications in heavy ion and particle physics. Their tolerance to bulk damage was recently improved by using high-resistivity (∼1kΩcm) epitaxial layers as sensitive volume (Deveaux et al. [1], Dorokhov et al. [2]).The radiation tolerance of conventional MAPS is known to depend on the pixel pitch. This is as a higher pitch extends the distance, which signal electrons have to travel by thermal diffusion before being collected. Increased diffusion paths turn into a higher probability of loosing signal charge due to recombination. Provided that a similar effect exists in MAPS with high-resistivity epitaxial layer, it could be used to extend their radiation tolerance further. We addressed this question with MIMOSA-18AHR prototypes, which were provided by the IPHC Strasbourg and irradiated with reactor neutrons. We report about the results of this study and provide evidences that MAPS with 10μm pixel pitch tolerate doses of ≳3×1014neq/cm2.