Abstract
Based on a modified dice-and-fill technique, a PIN-PMN-PT single crystal 1-3 composite with the kerf of 12 μm and pitch of 50 μm was prepared. The as-made piezoelectric composite material behaved with high piezoelectric constant (d33 = 1500 pC/N), high electromechanical coefficient (kt = 0.81), and low acoustic impedance (16.2 Mrayls). Using lithography and flexible circuit method, a 48-element phased array was successfully fabricated from such a piezoelectric composite. The array element was measured to have a central frequency of 20 MHz and a fractional bandwidth of approximately 77% at −6 dB. Of particular significance was that this PIN-PMN-PT single crystal 1-3 composite-based phased array exhibits a superior insertion loss compared with PMN-PT single crystal and PZT-5H-based 20 MHz phased arrays. The focusing and steering capabilities of the obtained phased array were demonstrated theoretically and experimentally. These promising results indicate that the PIN-PMN-PT single crystal 1-3 composite-based high frequency phased array is a good candidate for ultrasound imaging applications.
Highlights
Over the past few decades, due to its safety, convenience, and efficiency, ultrasound has attracted significant attention in biomedical research and clinical diagnosis [1,2,3,4,5,6]
A few studies have been carried on the high-frequency ultrasound phased array [18,19,20,21], though it is very useful in biomedical imaging by providing electronic-beam-focusing and steering capabilities
The PIN-PMN-PT wafer was diced from two perpendicular directions with a 100 μm pitch and 80 μm depth to form periodic rods
Summary
Over the past few decades, due to its safety, convenience, and efficiency, ultrasound has attracted significant attention in biomedical research and clinical diagnosis [1,2,3,4,5,6]. There are even fewer researches on composite-material-based high-frequency ultrasound phased arrays, despite the numerous benefits of composite piezoelectric materials (lower acoustic impedance, higher electromechanical coefficient, broader bandwidth, etc.). The above facts give rise to smaller size in both kerf and each element, which poses even greater challenges for piezoelectric material composite preparation and high frequency (≥20 MHz) phased array fabrication. The PIN-PMN-PT single crystal and its composite have been proven to be promising candidates for high frequency single element transducer fabrication [7,26,27]. It is of great interest to demonstrate the feasibility of the development of a PIN-PMN-PT single crystal 1-3 composite-based high frequency (≥20 MHz) ultrasound phased array. To demonstrate the imaging capability of this obtained device, wire phantom imaging experiments are carried out based on a commercial Verasonics Vantage 128 System
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