Piezoelectric ZnO nanorod carpet as a NEMS vibrational energy harvester

Abstract

A nanoelectromechanical vibrational energy harvester is reported based on a ZnO nanorod array coupled to a microelectromechanical mass-spring system. A carpet of vertically aligned crystalline zinc oxide nanorods grown using a low temperature process was characterized to determine their piezoelectric response to mechanical excitation. An atomic force microscope was operated in the force spectroscopy mode to probe ZnO nanorods applying a force in the µN range. In contrast to previously published reports using lateral tip motion (C-AFM), the motion of the AFM tip in our experiment was perpendicular to the plane of the nanorods, which closely mimics the operation of the bulk-micromachined NEMS energy harvester. Voltage pulses with amplitudes ranging from hundreds of µV to few mV were observed. The novelty of this work lies in the integration of the ZnO NEMS and Si-MEMS structures, the use of nanoimprint lithography to achieve periodic, vertical placement of the ZnO nanorods, and the demonstration of piezoelectric voltage generation through low-temperature processed ZnO nanorod carpet.