Piezoelectric resonators and oscillator circuit based on higher-order out-of-plane modes for density-viscosity measurements of liquids

Abstract

We report the use of two AlN-based piezoelectric microresonators for the monitoring of density and viscosity of liquids and its application to detect lubricant oil dilution with diesel fuel. Two devices designed to resonate in the 4th-order roof tile-shaped vibration mode, but with two different anchor schemes, were fabricated and characterized. Interface circuits were designed to convert the one-port impedance into a resonant two-port transfer function. This allowed us to implement a phase locked loop (PLL)-based oscillator circuit based on the resonators, the interface circuit and a commercial lock-in amplifier. Our results demonstrate the performance of the resonators in fluids having viscosities up to 500 mPa · s. The performance of the sensors in terms of sensitivity and resolution are compared for both anchor configurations.