Abstract
Lead-free (Na0.5Bi0.5)0.95Ba0.05TiO3 (0.95NBT–0.05BT) thin films were deposited on polycrystalline Ni substrates by using the RF high-pressure sputtering system. Microstructural studies by high resolution X-ray diffraction reveal that the as-deposited 0.95NBT–0.05BT thin films are polycrystalline structures. The piezoelectric property measurements by a piezoresponse force microscopy exhibit that the polycrystalline 0.95NBT–0.05BT thin films have an excellent piezoelectric response. It is indicated that the as-grown 0.95NBT–0.05BT thin films have the potential for the development of the structural health monitoring systems and related device applications.
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