Abstract
Ca Bi 4 Ti 4 O 15 (CBTi144) thin films are evaluated for use as lead-free thin-film piezoelectrics in microelectromechanical systems. CBTi144 thin films were prepared on Pt substrates by dip coating a precursor solution of metal alkoxides. We fabricated a piezoelectric bimorph actuator using those films and analyzed the displacement induced by the electric field. Young’s modulus was measured by the vibrating-reed technique and the piezoelectric constant d31 was derived by analysis of bending displacement and measurement of displacement-voltage curve. The measurements revealed that the CBTi144 films had a large piezoelectric constant d31 of 32pm∕V.
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