Abstract
For the application of bidirectional communication between a human activity monitoring system and a human using tactile sensation, a tactile MEMS device is developed. To obtain the displacement and provide energy to the human skin, a driving actuator and a displacement sensor are integrated. The tactile device is based on a cantilever with a lamination structure of polymer and Pb(Zr,Ti)O3 thin films. The characterization of the device showed that the sensor output agreed well with the tip displacement. For the touch experiment of the device, the frequency response demonstrates hardening-spring-like behavior. By using a piecewise linear system model, the behavior is analyzed. The experimental results and analytical model showed similar tendencies. These results indicate a potential application of the stiffness sensor of an object.
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