Abstract
The piezoelectric membrane, working as flexural acoustic wave devices, is introduced as high performance biosensor platform. Membranes made of polyvinylidene fluoride (PVDF) thin film were fabricated and the influences of size and stress on the resonance behaviors have been investigated. It is experimentally found that membrane could exhibits a nearly same Q factor both in air and in water. Additionally, the microelectronic process combined with megnetron sputtering deposition for fabricating ZnO micro membrane biosensor platform on silicon wafer is established in this paper.
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