Abstract
AbstractThis paper will first address the piezoelectric material characterization using a capacitance measurement technique. An original simple and efficient technique for the determination of the d33 piezoelectric coefficient of lead zirconate titanate thin films is described. Classical capacitor plate theory and piezoelectric material analysis are used to calculate the capacitance variation in lead zirconate titanate film, enabling piezo-electric coefficient to be determined. The technique outlined here avoids the use of mechanical/optical apparatus that may require heavy preparation of sample substrate geometry. Then, this work also treats design and fabrication issues associated with innovative tunable front-end components which combine two different ceramic technologies, namely multilayer ceramic circuit boards (low temperature cofired ceramics or LTCC) and piezoelectric actuator technology within a single device.
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