Abstract
Extremely high quality films of LiNbO/sub 3/ and LiTaO/sub 3/ are deposited on sapphire and LiTaO/sub 3/ substrates using Ar-F excimer laser ablation. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. SAW velocity, electromechanical coupling coefficients and frequency response are calculated. Experimental data of SAW properties coincide with calculated data.
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