Abstract

With the rapid advancement of 5 G technology, the demand for surface acoustic wave (SAW) devices is experiencing exponential growth. Precisely forecasting the speed at which Rayleigh waves propagate, taking into account size effects and flexoelectric properties, is vital for enhancing SAW device design. To address this need, the study explores Rayleigh wave propagation in a stratified system consisting of a nanoscale piezoelectric guiding layer atop an isotropic elastic substrate. The governing equations, boundary conditions, and interface continuity conditions between the guiding layer and substrate are established through the Hamiltonian principle. Following this, the dispersion equations for Rayleigh waves under electric open-circuit and electric short-circuit conditions are derived and solved numerically. Additionally, the effects of flexoelectricity, inertial gradients, strain gradients, electric field gradients, and the piezoelectric guiding layer thickness on the phase velocity of Rayleigh waves are extensively explored. Our findings indicate that flexoelectricity and strain gradients elevate the phase velocity, while inertial gradients and electric field gradients result in a decrease in the phase velocity. As the frequency of Rayleigh waves increases, the impact of these factors becomes more prominent. In addition, it is observed that electric field gradients play a less significant role compared to inertial gradients and strain gradients. The findings of this study could offer valuable insights for the advancement of miniaturized SAW devices designed for high-frequency service.

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