Sensitivity comparisons of layered Rayleigh wave and Love wave acoustic devices

Abstract

Due to their high sensitivity, layered Surface Acoustic Wave (SAW) devices are ideal for various film characterization and sensor applications. Two prominent wave types realized in these devices are Rayleigh waves consisting of coupled Shear Vertical and Longitudinal displacements and Love waves consisting of Shear Horizontal displacements. Theoretical calculations of sensitivity of SAW devices to pertubations in wave propagation are limited to idealized scenarios. Derivations of sensitivity to mass change in an overlayer are often based on the effect of rigid body motion of the overlayer on the propagation of one of the aforementioned wave types. These devices often utilize polymer overlayers for enhanced sensitivity. The low moduli of such overlayers are not sufficiently stiff to accommodate the rigid body motion assumption. This work presents device modeling based on the Finite Element Method. A coupled-field model allows for a complete description of device operation including displacement profiles, frequency, wave velocity, and insertion loss through the inclusion of transmitting and receiving IDTs. Geometric rotations and coordinate transformations allow for the modeling of different crystal orientations in piezoelectric substrates. The generation of Rayleigh and Love Wave propagation was realized with this model by examining propagation in ST Quartz both normal to and in the direction of the X axis known to support Love Waves and Rayleigh Waves, respectively. Sensitivities of layered SAW devices to pertubations in mass, layer thickness, and mechanical property changes of a Polymethyl methacrylate (PMMA) and SU-8 overlayers were characterized and compared. Experimental validation of these models is presented.