Abstract

Institute of Optics & Electronics (IOE), Chinese Academy of Sciences (CAS) has more than 30 years’ experience on piezoelectric deformable mirror (DM) technologies research and developing since early 1980s. Several DMs of IOE have been used in many different application systems. A brief history of piezoelectric DMs development in IOE and several recently achievements, and the main characters, performance and test results of the DMs for astronomy will be presented in this paper. 1) High-order DM. DM prototype with 913-element for 4m telescope has been fabricated and tested in laboratory. 2) Adaptive Secondary Mirror (ASM). A 73-element ASM prototype with 12 microns stroke for 1.8m telescope has been fabricated. It will be installed onto the 1.8m telescope with a compact adaptive optics (AO) system. 3) Small spacing DM. A 6mm spacing 127-element DM based on the same construction with the High-order DM has been used in AO system of 1m New Vacuum Solar Telescope (NVST) in Yunnan Observatories. Higher density (3mm spacing) DM based on a novel construction has being developed. In 2012, the novel DM prototype with 100-element was fabricated and tested carefully in laboratory. Beside, a 6mm spacing 151-element DM based on the novel construction has being fabricated for the solar AO system.

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