Abstract
One of the key requirements for MEMS speakers is to increase the sound pressure level (SPL) while keeping the size as small as possible. In this paper we present a MEMS speaker based on piezoelectric bimorph cantilevers that produces a higher SPL than conventional unimorph cantilever speakers. The active diaphragm size is 1.4 × 1.4 mm2. The bimorph cantilevers are connected in parallel to make full use of the actuation voltage. At 1 kHz, the measured SPL reached 73 dB and the peak SPL reached 102 dB at the resonance frequency of 10 kHz in a 711 ear simulator under a driving voltage of 10 Vrms. The total harmonic distortion of the MEMS speaker was less than 3% in the range from 100 Hz to 20 kHz. Although the absolute SPL was not the highest, this work provides a better SPL for all piezoelectric MEMS speakers.
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