Abstract
Parallel microgrooves and mesh structure with a line width of about 16 μm, which is much smaller than the diameter of the laser focus spot of 50 μm, are fabricated on Al2O3 ceramic surfaces by picosecond laser patterning with optical fiber induction. The patterned grooves are of high quality without burr, recasting or thermally induced cracks. Grain refinement of the groove surfaces caused by the rapid condensation and redeposition during picosecond laser irradiation with optical fiber induction improved the smoothness and mechanical strength of the grooves. Different patterns can be fabricated by adjusting the optical fiber layout, which is independent of the laser scanning direction. The regions etched by the laser are kept in near-field contact with the optical fibers when the laser beam passes through the fibers and irradiates the ceramic surface. This results in localized field enhancement between the transparent optic fiber and ceramic surface, which produces the precise microgrooves. The developed technique allows high-resolution micromachining of the surfaces of hard and brittle ceramic-type materials.
Published Version
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