Picosecond laser structuring of thin film platinum layers covered with tantalum pentoxide isolation

Abstract

A thin film layer system consisting of platinum (Pt) as conductive layer on a glass substrate and tantalum pentoxide as isolating layer on top of the platinum is attractive for designing biocompatible conductor paths and contact pads for bio sensor chips. For the flexible and rapid patterning of the conductive and the isolating layers, both, the complete removal and the selective ablation of the individual thin films were investigated using ultra-short laser pulses with about 10 ps pulse duration and 1064 nm wavelength at low laser fluences. A platinum film covered with tantalum pentoxide shows a significantly lower ablation threshold than a single Pt film on glass alone when illuminated from the front side. Furthermore, we explored that the tantalum pentoxide film can be removed by glass side illumination from the Pt film, without affecting the Pt film and leaving the Pt film on the glass substrate intact. Those ablation phenomena occur at laser fluences of about 0.2 J/cm2, far below the evaporation limit of platinum. We present a detailed ablation threshold value examination for the structuring of these layer systems by front side and glass side irradiation for different film thicknesses. Furthermore, we discuss the possible underlying physical mechanisms of these ablation phenomena.