Abstract
Superconducting tunnel junctions as well as transition edge thermometers could benefit from high quality thin films. We point out the important features of various cryo detectors and show where high purity, or even epitaxially grown films are advantageous for detector performance. Some fabrication methods are discussed and methods of film characterization introduced. Photolithography has proven necessary to fabricate the complex structure of the present cryo detectors.
Published Version
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