Abstract

Piezoelectric devices transduce mechanical energy to electrical energy by elastic deformation, which distorts local dipoles in crystalline materials. Amongst electromechanical sensors, piezoelectric devices are advantageous because of their scalability, light weight, low power consumption, and readily built-in amplification and ability for multiplexing, which are essential for wearables, medical devices, and robotics. This paper reviews recent progress in active piezoelectric devices. We classify these piezoelectric devices according to the material dimensionality and present physics-based device models to describe and quantify the piezoelectric response for one-dimensional nanowires, emerging two-dimensional materials, and three-dimensional thin films. Different transduction mechanisms and state-of-the-art devices for each type of material are reviewed. Perspectives on the future applications of active piezoelectric devices are discussed.

Highlights

  • Piezoelectric materials transduce mechanical energy to electrical energy by generating a voltage signal that is dependent on the applied stresses [1]

  • Piezoelectric nanowires paved the way for the development of miniaturized strain sensors to be organized as large-scale pressure sensor arrays and force imagers using simple Schottky diode structures

  • Systematic approaches might lead to statistically uniform performance, which is required for practical adoption of these devices, such as aligning the nanowires on textured substrates or integrating multiple nanowires into a single junction to average out the randomness of the dispersed nanowires

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Summary

Introduction

Piezoelectric materials transduce mechanical energy to electrical energy by generating a voltage signal that is dependent on the applied stresses [1]. Under the presence of mechanical stimuli, these dipole moments are either strengthened or weakened depending on the direction and strength of the applied stress Because they can be uniformly aligned, the change of each dipole moment collectively adds and generates a strong net dipole moment across the material [2]. A variety of electromechanical sensors and transducers are engineered from these piezoelectric materials [3,4,5] Ferroelectric materials, such as lead zirconate titanite (PZT), have been widely adopted owing to their high piezoelectric coefficient, which is a measure of a material’s ability to transduce mechanical forces to electric potentials.

Generation of Polarization upon the Mechanical Stress
Schottky Diodes as Piezoelectric Sensors
Tables dependencies
Piezoelectric Nanowire-Based Strain Sensors
Vertical
Vertical Nanowire-Based Strain and Force Sensors
Piezophototronic Devices
Piezophototronic-effect-assisted
Summary
Thin-Film-Based Piezoelectric Devices
ZnO Thin-Film Transistors with Piezoelectric Sensing
ZnO TFTs for Pressure Sensing
Applications in Robotics
Pressure sensor array using arraywith withpiezoelectric piezoelectric
I-V I-V characteristics of
Piezoelectric Coefficient of 2D TMDC
TMDC Based Strain Sensors
Flexoelectricity for Out-of-Plane Piezoelectric Effect
10. Flexoelectricity
Findings
Summary and Outlook

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