Abstract
The CaCuO2 target was prepared by solid state reaction (SSR) method from CaCO3 and CuO precursor powders. These precursor powders were mixed with mortar, and pressed by single hydraulic for sintering at temperature 600, 650, 700, and 750 ˚C within the thermogravimetric-differential thermal analyses (TG-DTA). The phase identification, atomic composition, hardness, and density of CaCuO2 target were measured and analyzed by X-ray diffraction (XRD) and energy dispersive X-ray (EDX), micro hardness tester and density kit techniques, respectively. It was found that, the CaCuO2 target shows nearly single phase, responded chemical composition, and high density after sintered at 700 ˚C. This result shows best target for deposition thin film by DC magnetron sputtering.
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