Abstract
Abstract : The paper attempts to review recent advances in our understanding of the physical processes that govern the behaviour of vacuum systems. The behaviour of a vacuum system changes at a pressure where the mean free path approaches the dimensions of the apparatus. Above this pressure (typically 0.001 torr) behaviour is dominated by interactions in the gas phase, whereas below this pressure behaviour is governed principally by interactions at surfaces. This paper is concerned with the pressure region below 0.001 torr. The interactions discussed are those of gaseous neutral atoms and molecules with solids, electrons with gas-covered solids and gaseous ions with solids. The effects of electron-induced desorption and of ion and electron trapping in pressure sensors are also treated. (Author)
Published Version
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