Abstract
Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and experiment as a rudimentary means to both steer and shape an incident light beam through photothermal actuation. A series of unit step infrared laser exposures were applied at increasing power levels to both uniformly symmetric and deliberately asymmetric absorptive structures with the intent of characterizing the photothermal tilt response. The results indicate that a small angle (<4° at ~74 W/cm2) mechanical tilt can be instantiated through central placement of an infrared beam, although directional control appears highly sensitive to initial beam placement. Greater responsivity (up to ~9° mechanical tilt at ~54 W/cm2) and gross directional control was demonstrated with an asymmetrical absorptive design, although this response was accompanied by a large amount (~5–10°) of mechanical tilt burn-in and drift. Rigorous device cycling remains to be explored, but the results suggest that these structures, and those similar in construction, can be further matured to achieve controllable photoactuation suitable for optical beam control or other applications.
Highlights
IntroductionLight-induced mechanical actuation has been of significant interest to the microsystems community for decades (see [1]) as it offers a remote, wireless means of power and control, which is necessary for autonomous design concepts that demand electrical isolation
Results and Discussion how the curvature of the platform changed in concert with the angular motion. This was Experimental characterization theprevious photothermal response performed on several accomplished by first converting of the thresholdandwas background-subtracted structures, with results from two baseline
Results and Discussion preference in tilt direction can be attributed to a combination of the asymmetric deformation characterization the photothermal response positioning was performed sevof theExperimental central plate and interconnect of supports, as well as imperfect of theonbeam
Summary
Light-induced mechanical actuation has been of significant interest to the microsystems community for decades (see [1]) as it offers a remote, wireless means of power and control, which is necessary for autonomous design concepts that demand electrical isolation. Like other forms of stimuli-responsive actuation, which have been well summarized in recent review articles [13,14,15], the “smart” or “reconfigurable” device behavior that is being exploited is a result of both the material response and the structural design. The device fabrication is most commonly accomplished through conventional microfabrication methods based upon UV lithography being applied to layered thin films, localized modification and additive manufacturing have become more prevalent through direct laser writing [13]
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