Photostructural transformations in amorphous chalkogenide nanolayered films produced by thermal vapour deposition

Abstract

Photo- and thermoinduced changes of As2S3 \\SexTe1−x (0.1 < x < 0.5) multilayer structures were investigated by optical and electrical methods as well as by low angle X-ray diffraction (LAXD). It was shown that samples with total thicknesses up to 0.7–0.8 μm of 4–20 nm thick alternating layers with good periodicity, may be prepared by cyclic thermal vapour deposition. The structure of this multilayer may be changed by thermal treatment or illumination with focused laser beam due to the interdiffusion. The corresponding photoinduced changes of optical parameters (absorption, refraction) are useful for optical reading.