Abstract
Abstract We present the design, fabrication, and characterization of suspended arrays of small volume, high quality factor (Q) silicon nitride photonic crystal nanobeam (PCNB) cavities with lateral nanorod fin structures. By controlling the alignment position of the fins with respect to the air holes, the resonance wavelength and Q-factor of the PCNB cavities can be tuned to realize the desired performance. Measured tunable range of 2 × 104 and 10 nm is achieved for Q-factor and resonance wavelength, respectively, with the highest Q-factor measured at 2.5 × 104. Incorporating such nanorod fins into the nanobeam cavity is demonstrated to provide improved mechanical support, thermal transport, and channels of lateral carrier injection for the suspended PCNB. The proposed PCNB cavities with lateral fins are advantageous for energy efficient, ultra-compact lasers, modulators, filters, and sensors.
Highlights
During the last several decades, the field of photonic crystal has seen drastic developments in both theory and application [1,2,3,4,5]
We present the design, fabrication, and characterization of suspended arrays of small volume, high quality factor (Q) silicon nitride photonic crystal nanobeam (PCNB) cavities with lateral nanorod fin structures
We propose and investigate a suspended silicon nitride photonic crystal nanobeam (PCNB) cavity with lateral nanorod fin structures on both sides of the nanobeam cavity, where the alignment of the fin position is tunable to achieve a range of desired Q-factor and resonance wavelength
Summary
During the last several decades, the field of photonic crystal has seen drastic developments in both theory and application [1,2,3,4,5]. Current nanobeam cavities have non-negligible trade-offs in electrical/optical/mechanical/thermal efficiencies due to the required high index contrast cladding and suspended structure. Earlier, nonsuspending tunable nanobeam cavities were reported with one-sided nanotentacles (connecting fins) that improve thermal conductivity and tunability [24]. We propose and investigate a suspended silicon nitride photonic crystal nanobeam (PCNB) cavity with lateral nanorod fin structures on both sides of the nanobeam cavity, where the alignment of the fin position is tunable to achieve a range of desired Q-factor and resonance wavelength. We compare the optical performances of the very same PCNB with and without fins. Compared to the traditional suspended nanobeam cavity, the introduction of the lateral fins improves the mechanical strength, thermal conduction, and electrical carrier injection of the suspended PCNB cavity
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