Abstract
In this work, photonic crystal (PhC) Resonator including two hexagonal rings in a two dimensional (2-D) photonic crystal silicon slab of hexagonal lattice are investigated as a channel drop filters. The add-drop selective wavelength is around 1553.6 nm with high Quality factor over 3800. By leveraging the ultra small and ultra sensitive characterization of the PhCs resonator, integration of the microcantilevers for nanoelectromechanical systems (NEMS) is proposed to investigate the sensor applications and the cantilever MEMS structure is used. The proposed shape of the PhC Resonator has two hexagonal rings are named as dual-nano-ring (DNR) resonator and the sensing characteristics of DNR resonator at various positions adjacent to the junction of the microcantilever and the substrate are investigated. The minimum detectable force can be as small as 37 nN.
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