Abstract
Photonic crystal (PhC) based channel drop filters including two hexagonal rings in a two dimensional (2-D) photonic crystal silicon slab of hexagonal lattice are integrated on microcantilevers for nanoelectromechanical systems (NEMS) sensor applications. The proposed two hexagonal rings are named as dual nano-ring (DNR) resonator. The sensing characteristics of dual nano-ring (DNR) resonator at various positions adjacent to the junction of the microcantilever and the substrate are investigated. The derived quality factors is over 3000, and the minimum detectable force can be as small as 7.58 nN. Moreover, the continuous wave field distribution modeling is deployed to explain the origins of resonant mechanisms occurred in deformed DNR resonator under various applied forces.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
