Abstract
For scattered light measurements, a novel scatterometer that is based on photon counting using extinction filters is proposed. A photon counter is used as the detector, with the advantages of high dynamic range, high linearity, and detection of light down to the single-photon level. Extinction filters expand the dynamic range of the detector, and data acquired using the filters are stitched together. The use of the photon counting device and the extinction filters results in a dynamic range extending over 11 orders of magnitude. Light scattered by three parallel slabs of glass are measured, and compared with roughness parameters obtained by atomic force microscopy.
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