Abstract
Highly c-axis oriented Ga-doped ZnO films (GZO) have been grown on sapphire (0001) substrates by pulsed laser deposition (PLD) method. Photoluminescence (PL) spectra indicate that Ga atoms have a large effect on the luminescent properties of ZnO films. PL spectra of GZO films show near band edge (NBE) emissions and broad orange deep-level emissions. The NBE emission shifts to higher energy region and the intensity decreases with the increase of Ga concentration. The blue shift of NBE emission results from Burstein-Moss effect. The quenching of NBE emission is ascribed to the noradiative recombination. The orange emission is related to the oxygen vacancies.
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