Abstract
Silicon nano-slot waveguides have proven to be useful for a variety of applications, including nonlinear optics, biosensing, and electrooptic modulation. In particular, an electrooptic polymer clad, electrically contacted, strip-loaded slot waveguide design has been shown to be particularly useful for high-bandwidth electrooptic modulators. One of the significant challenges for many of the applications of these waveguides is the necessity of low waveguide losses. We demonstrate the ability to fabricate single mode strip-loaded slot waveguides, with losses as low as 6.5 dB/cm, using conventional stepper-based photolithography. Additionally, we discuss the benefits of an asymmetric slot waveguide design and present improved losses as low as 2 dB/cm for both asymmetric strip-loaded slot waveguides and regular asymmetric slot waveguides fabricated in a different photolithographic process.
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