Abstract
Films spin‐coated from solutions containing the copolymer of glycidyl methacrylate and ethyl acrylate and the transition metal salt undergo cross‐linking upon irradiation at 254 nm and subsequent heating at 70°C. The mechanism of cross‐linking proceeds in two distinct stages: (i) the primary photochemical process involving redox decomposition of the cobalt salt; (ii) one or more thermally activated reaction(s) between the decomposition products and the pendant epoxide groups of the copolymer. Half‐micron films retain 50% of their thickness at a dose of 35–40 mJ/cm2, and the system possesses a contrast near two. Preliminary lithographic evaluation of this material reveals that images with features in the 1–2 μm range can be resolved.
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