Abstract
Photodissociation of trimethylgallium (TMG) and trimethylaluminum (TMA) on a quartz substrate at 20°C was studied at 248 nm. Gallium and aluminum atoms were detected by laser induced fluorescence (LIF). TMG and TMA were photodissociated predominantly on the substrate surface. Translational energy distributions of gallium and aluminum atoms were found to obey the Maxwell-Boltzmann distribution with a translational temperature of circa 2000 K. The angular distribution of gallium atoms ejected from the surface following photolysis was measured, and an anisotropic cos 8 θ distribution was found.
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