Abstract
Structural and compositional changes of Co phthalocyanine (CoPc) films irradiated by ultraviolet (UV) light of 7.21 eV using an excimer lamp and the corresponding photo-oxidation process have been investigated. Optical absorption and X-ray photoelectron spectroscopy (XPS) measurements showed that the CoPc molecules in the films are completely decomposed by the light irradiation and resultant photo-oxidation, so that only Co oxides remain on the substrate surface. The C–N bonds which form the main frame of the Pc molecule were found to be broken with a high probability at an earlier stage of the dissociation process, as compared to the C=C bonds. The organic species with the bonds cleaved by photo-oxidation were finally removed from the substrate surface.
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